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Experimental Characterization Of Femtosecond Laser Micromachining For Silicon Mold Fabrication And Hot Embossing For Polymer Microreplication
(Mechanical Engineering, 2007-08-23)
Hot embossing is a fabrication technique employed for replicating microfeatures on a polymer surface that was primarily developed to fabricate MEMS devices for microfluidic applications. This manuscript deals with ...